Résumé: Auger electron spectroscopy and electron energy loss spectroscopy (EELS) have been used to characterize the oxide InPO4 whose thickness is about 10 A as grown on the substrate InP (1 0 0). The behaviour of the surface was studied following either electron irradiation or heating in UHV. The high sensitivity of the EELS, showed a structural change of the surface after irradiation with electrons of 5 keV energy, InPO4 being sensitive to the electron beam. However, this surface oxide appeared to be stable when heated in UHV at 450[deg]C.

Langue: Anglais
Thème Chimie

Mots clés:
Traitement thermique
Stabilité thermique
Spectrométrie Auger